MEMS Technology

  1. Y. Nemirovsky and A. El-Bahar, The Non Equilibrium Band Model of Silicon in TMAH and in Anisotropic Electrochemical Alkaline Etching Solutions, Sensors and Actuators, 75, pp. 205-214, (1999).
  2. Y. Nemirovsky, I.A. Blech and J. Yahalom, Abnormal Undercutting in Etched Cr-Au Films, J. Electrochem., Vol. 125, pp. 1177-1179, 1978.
  3. R. Ishihara, A. Glazer, Y. Raab, P. Rusian, M. Dorfan, B. Lavi, I.Leizerson, A. Kishinevsky, Y. van Aandel, X. Cao, J. W. Metselaar and C. I.M. Beenakker, S. Stolyarova and Y. Nemirovsky, A Novel Selected Area Laser Assisted (SALA) System for Crystallization and Doping Processes in Low-Temperature Poly-Si Thin-Film Transistors, Journal of IEICE (Instituteof Electronics, Information and Communication Engineers), Oxford, to be published, 2006.
  4. A. El-Bahar, Y. Nemirovsky, J.F. Soustiel and N. Fernsod, Micromachined CMOS Pressure Sensor, Melecon’98, 9th Mediterranean Electrotechnical Conference, Tel-Aviv, Israel, 18-20 May 1998.
  5. M. Kovler, D. Stavosvetsky, Y. Nemirovsky and Y. Yahalom, Silicon Electromachining Processes in Aqueous Solutions, Materials Research Symposium (MRS), Materials Science of Microelectromechanical System (MEMS) Devices, November 1998, Boston, USA.
  6. C. G. Jakobson, S. Kaldor, E. Sidirov, A. Nemirovsky and Y. Nemirovsky, A Silicon-Optical-Bench Approach to Cost-Effective Packaging for the Telecommunication Market, 21st Israeli Vacuum Society Conference, Sept. 11/12, 2002, Dan Tel Aviv Hotel.
  7. T. Nachmias, L. Carmiel, S. Meltzer, T. Tepper-Faran, O. Bochobza-Degani, C. Yarnitzky, Y. Nemirovsky, Optimization of Sacrificial Structures for Large Holes Fabrication Using DRIE, IsraMEMS 2005, Technion, June 2005.
  8. A. Prochaska, S. Stoleyarov, A. Bransky, N. Korin, Y. Nemirovsky, U. Dinnar, Micromachined Fabrication Technologies of Microchannels, IsraMEMS 2005, Technion, June 2005.
  9. R. Ishihara, A. Glazer, Y. Raab, P. Rusian, M. Dorfan, B. Lavi, I. Leizerson, A.Kishinevsky, Y. van Aandel, X. Cao, J. W. Metselaar and C. I. M. Beenakker, S.Stolyarova and Y. Nemirovsky, A Novel Selected Area Laser Assisted (SALA) System for Crystallization and Doping Processes in Low-Temperature Poly-Si Thin-Film Transistors, Proceedings of 12th International Display Workshops, Japan, December 6-9, 2005.
  10. S. Stolyarova, A. Glazer, Y. Raab, P. Rusian, M. Dorfan, B. Lavi, I. Leizerson, A. Kishinevsky, R. Ishihara*, Y. van Aandel, X. Cao, J. W. Metselaar and C. I. M. Beenakker, and Y. Nemirovsky, Selected Area Laser Assisted (SALA) Crystallization and Doping in Low-Temperature Poly-Si Thin-Film Transistors, The 14th IVS Annual Conference&Technical Workshop, Ganei Taaruchah, Tel-Aviv, October 27, 2005. 2. S. Stolyarova, M. Weinstein, Y. Sinai and Y. Nemirovsky “Growth and Annealing of Nanocrystalline CdxZn1-xS Films for Microelectronics” The 14th IVS Annual Conference&Technical Workshop, Ganei Taaruchah, Tel-Aviv, October 27, 2005.
  11. Shai Feldman and Yael Nemirovsky, Integration and Assembly of Micromechanical Devices, Integration Microelectronics and Packaging Society, June 25, 2002, Tel Aviv.
  12. S. Feldman; Y. Nemirovsky, MEMS devices assembly and packaging, Invited lecture , Israel IMPAS convention – March 2003.
  13. Yael Nemirovsky, A decade of MEMS activity (1991-2001) at Technion, Department of Electrical Engineering, MEMS Day In Israel, November 2001, Mosad Neeman.
  14. Y. Nemirovsky, The fascinating world of MEMS, Technology frontier lectures”, Technion, January 2005.
  15. Y. Nemirovsky, An overview of MEMS, Hewlett-Packard, March 2006.
  16. Y. Nemirovsky, A taste of MEMS and NEMS, Holon Technology Institute, April 2006.
  17. Y. Nemirovsky, The world of MEMS and NEMS, Jerusalem College of Engineering, May 2006.
  18. S. Stolyarova, A. Simanovskis, Y. Nemirovsky, Factors Affecting Degradation of Metal Films, Abstract Book of the 1st International Congress of Adhesion Science and Technology, Amsterdam 1995, p. 108.
  19. S. Stolyarova, Y. Nemirovsky, Mechanisms of Degradation of Metal Film-Crystal Interfaces, Abstract Book of the Annual Conf. of the Israeli Association for Crystal Growth, 1995, p. 33.