MEFS: Valves, Micropumps

  1. A. Machauf Prochaska, U. Dinnar, Y. Nemirovsky, A membrane micropump electrostatically actuated across the working fluid, J. Micromech. Microeng. 15, 2309-2316 (2005).
  2. A. Machauf Prochaska, O. Degani, Y. Nemirovsky, Electrostatically actuated microvalve based on flip-chip bonding, submitted to Sensors and Actuators, March 2006.
  3. A. Prochaska, R. Khamaisi, U. Dinnar, O. Degani and Y. Nemirovsky, Electrostatically Actuated Micropump with Dynamic Passive Valves, 2003 Mechanical Engineering Conference, Israel, Haifa, Technion.
  4. A. Prochaska, O. Degani, Y. Nemirovsky, Novel electrostatically actuated pull-in-based microvalve, IsraMEMS 2003, Tel Aviv University.